Title: Leakage current of high-fluence neutron-irradiated 8" silicon sensors for the CMS Endcap Calorimeter Upgrade Show Chinese title

Title: 高通量中子辐照的8英寸硅传感器漏电流用于CMS端盖 calorimeter 升级

Abstract: The HL-LHC will challenge the detectors with a nearly 10-fold increase in integrated luminosity compared to the previous LHC runs combined, thus the CMS detector will be upgraded to face the higher levels of radiation and the larger amounts of collision data to be collected. The High-Granularity Calorimeter will replace the current endcap calorimeters of the CMS detector. It will facilitate the use of particle-flow calorimetry with its unprecedented transverse and longitudinal readout/trigger segmentation, with more than 6M readout channels. The electromagnetic section as well as the high-radiation regions of the hadronic section of the HGCAL (fluences above $10^{14}~n_{eq.}/cm^{2}$) will be equipped with silicon pad sensors, covering a total area of 620 m$^2$. Fluences up to $10^{16}~n_{eq.}/cm^{2}$ and doses up to 1.5 MGy are expected. The sensors are processed on novel 8" p-type wafers with an active thickness of 300 $\mu{}m$, 200 $\mu{}m$ and 120 $\mu{}m$ and cut into hexagonal shapes for optimal use of the wafer area and tiling. Each sensor contains several hundred individually read out cells of two sizes (around 0.6 cm$^2$ or 1.2 cm$^2$). To investigate the radiation-induced bulk damage, the sensors have been irradiated with neutrons at RINSC to fluences between $6.5 \times 10^{14}~n_{eq.}/cm^{2}$ and $1.4 \times 10^{16}~n_{eq.}/cm^{2}$. Electrical characterization results are presented for full sensors, as well as for partial sensors cut from multi-geometry wafers with internal dicing lines on the HV potential within the active sensor area. Leakage current behaviour is investigated for various sensor types and fluence levels, including its temperature dependence. Finally, methods to limit the annealing time of the sensors during irradiation are investigated by analysing the impact of splitting high-fluence irradiations. Show Chinese abstract

Abstract: 高亮度强子对撞机（HL-LHC）将使探测器面临比之前所有大型强子对撞机（LHC）运行总和高出近10倍的积分亮度，因此CMS探测器将进行升级以应对更高的辐射水平和需要收集的更大数量的碰撞数据。 高精度量能器将取代CMS探测器当前的端盖量能器。 它将通过其前所未有的横向和纵向读出/触发分段，促进粒子流量能计的使用，拥有超过600万个读出通道。 HGCAL的电磁部分以及强辐射区域（通量高于$10^{14}~n_{eq.}/cm^{2}$）将配备硅像素传感器，覆盖总面积为620平方米$^2$。 预计通量可达$10^{16}~n_{eq.}/cm^{2}$，剂量可达1.5 MGy。 这些传感器采用新型8英寸p型晶圆制造，有效厚度分别为300$\mu{}m$、200$\mu{}m$和120$\mu{}m$，并被切割成六边形形状，以最佳利用晶圆面积和拼接。 每个传感器包含数百个单独读取的单元，有两种尺寸（约0.6 cm$^2$或 1.2 cm$^2$）。 为了研究辐射引起的体损伤，传感器在RINSC用中子辐照，通量范围在$6.5 \times 10^{14}~n_{eq.}/cm^{2}$和$1.4 \times 10^{16}~n_{eq.}/cm^{2}$之间。 展示了完整传感器以及从具有内部划片线的多几何结构晶圆上切割出的部分传感器的电气特性结果，这些内部划片线位于有源传感器区域内的高压电位上。 研究了各种传感器类型和通量水平下的漏电流行为，包括其温度依赖性。 最后，通过分析分割高通量辐照的影响，研究了在辐照期间限制传感器退火时间的方法。