标题： SrTiO3 表面的研究与表征 显示英文标题

标题： Study and characterization of SrTiO3 surface

摘要： 二维电子气（2DEG）在氧化物界面和表面上引起了物理学和研究的广泛关注，因为其独特的电子特性以及在光电子学和纳米电子学中的潜在应用。氧化物界面处2DEG的起源已被归因于众所周知的“极性灾难”机制。另一方面，最近在清洁的SrTiO3(001)表面也发现了一个2DEG，这是由于氧空位形成的。然而，到目前为止，这些2DEG系统主要是在原子级完美的晶体样品上发现的，通常通过脉冲激光沉积或分子束外延生长，即这些样品难以制备并需要特定的实验条件。在这里，我们报告了通过磁控溅射法制备的SrTiO3薄膜，这种方法适合批量生产适用于纳米电子应用的样品。对其结构和电子性质进行了表征，并与SrTiO3单晶进行了比较。XRD图谱和SEM显微图像显示，沉积的薄膜是非晶态的，通过在900{\deg }C下加热，其结构会转变为多晶态。光电子能谱（XPS和UPS）用于研究薄膜和晶体的电子性质。在两者中，我们都在费米能级观察到了2DEG系统，并且在将表面加热至900{\deg }C后观察到了Ti3+态的形成。 显示英文摘要

摘要： The two-dimensional electron gas (2DEG) at oxides interfaces and surfaces has attracted large attention in physics and research due to its unique electronic properties and possible application in optoelectronics and nanoelectronics. The origin of 2DEGes at oxide interfaces has been attributed to the well known "polar catastrophe" mechanism. On the other hand, recently a 2DEG was also found on a clean SrTiO3(001) surface where it is formed due to oxygen vacancies. However, these 2DEG systems have been until now found mostly on atomically perfect crystalline samples usually grown by pulsed laser deposition or molecular beam epitaxy i.e. samples which are difficult to be prepared and require specific experimental conditions. Here, we report on the fabrication of SrTiO3 thin films deposited by magnetron sputtering which is suitable for mass-production of samples adapted for nanoelectronic applications. The characterization of their structural and electronic properties was done and compared to those of SrTiO3 single crystals. XRD patterns and SEM micrography show that the deposited films are amorphous and their structure changes to polycrystalline by heating them at 900 {\deg}C. Photoemission spectroscopy (XPS and UPS) was used to study the electronic properties of the films and the crystal. In both, we observe the 2DEG system at Fermi level and the formation of Ti3+ states after heating the surface at 900 {\deg}C.