标题： 三维应变场通过动力散射的反演重建 显示英文标题

标题： 3D Strain Field Reconstruction by Inversion of Dynamical Scattering

摘要： 应变不仅决定了材料的力学响应，还影响其电子、光学和催化性能。 因此，测量三维应变场对于深入理解材料性质以及通过应变工程进一步开发材料性能至关重要。 然而，沿电子束方向测量应变变化仍然是（扫描）透射电子显微镜（S/TEM）的一个主要挑战。 在本文中，我们提出了一种利用4D-STEM进行三维应变场测定的方法。 该方法基于对沿束方向应变场变化产生的动态衍射效应的逆过程。 我们使用具有已知真实值的模拟数据对该方法进行了测试，并展示了其在倾斜伪外延生长的Al$_{0.47}$Ga$_{0.53}$N层的实验4D-STEM数据集中的应用。 显示英文摘要

摘要： Strain governs not only the mechanical response of materials but also their electronic, optical, and catalytic properties. For this reason, the measurement of the 3D strain field is crucial for a detailed understanding and for further developments of material properties through strain engineering. However, measuring strain variations along the electron beam direction has remained a major challenge for (scanning-) transmission electron microscopy (S/TEM). In this article, we present a method for 3D strain field determination using 4D-STEM. The method is based on the inversion of dynamical diffraction effects, which occur at strain field variations along the beam direction. We test the method against simulated data with a known ground truth and demonstrate its application to an experimental 4D-STEM dataset from an inclined pseudomorphically grown Al$_{0.47}$Ga$_{0.53}$N layer.