标题： 电容调谐的SIW倏逝模腔用于谐振微波等离子体喷流 显示英文标题

标题： Capacitive-Tuned SIW Evanescent-Mode Cavity for Resonant Microwave Plasma Jet

摘要： 本文介绍了一种新颖的大气压和频率可调的微波等离子体喷嘴，该喷嘴利用了渐逝模腔谐振器技术。 设计采用了一种基板集成波导方法，其中两个印刷电路板基板组装在一起以形成谐振微波等离子体喷嘴结构。 这种配置在调谐范围内提供了出色的匹配性能，并且可以在仅几瓦的最小输入功率下产生高效能的等离子体喷嘴。 原型的谐振频率可以从2.94 GHz调至2.66 GHz，无需调谐电容器，当在顶部印刷电路板上蚀刻的圆形槽并联一个最大为1.6 pF的电容器时实现。 本文提出了一种针对该原型的新颖电路模型设计方法，所制造原型的测量性能与仿真结果之间的密切一致性验证了该模型。 所实现的频率可调性是关键特性，对于通过低成本印刷电路板制造工艺制作等离子体喷嘴以及在需要通过改变点火频率来操控等离子体化学性质的应用中至关重要。 显示英文摘要

摘要： This paper introduces a novel atmospheric pressure and frequency-tunable microwave plasma jet utilizing evanescent-mode cavity resonator technology. The design uses a substrate-integrated waveguide approach, where two PCB substrates are assembled to form the resonant microwave plasma jet structure. This configuration provides excellent matching performance across the tuning range and can generate power-efficient plasma jets with a minimal input power of just a few watts. The prototype's resonant frequency can be tuned from 2.94 GHz, with no tuning capacitor, to 2.66 GHz when a capacitor placed in parallel with a circular slot etched on the top PCB board varies up to 1.6 pF. A novel circuit model design approach for this prototype is presented, and close agreement between the measured performance of the fabricated prototype and the simulation results validates this model. The frequency tunability achieved is a critical feature for fine-tuning the plasma jet when fabricated by low-cost PCB manufacturing and for applications in which manipulating the plasma chemistry by varying the ignition frequency is essential.