标题： 原位三维自由形状耦合元件的纳米打印用于混合光子集成 显示英文标题

标题： In-Situ 3D Nano-Printing of Freeform Coupling Elements for Hybrid Photonic Integration

摘要： 混合光子集成利用了不同材料平台的互补优势，因此在性能和设计灵活性方面优于单片方法。 这一点尤其适用于多芯片概念，其中组件可以在集成到更复杂的系统之前在单独的芯片上进行单独优化和测试。 然而，此类系统的组装仍然是一项主要挑战，需要复杂且昂贵的高精度对准过程以及对光学模式轮廓的仔细适应。 在这里，我们展示了通过在光学组件的端面上原位纳米打印自由形式的光束整形元件，可以克服这些挑战。 该方法适用于各种设备和组装概念，并允许适应差异很大的模式轮廓，同时显著放宽对准公差，使得可扩展的、成本效益高的被动组装技术得以使用。 我们通过在芯片和光纤端面制造和测试一系列光束整形元件，实验验证了该概念的可行性，实现了磷化铟激光器与光纤之间高达88%的耦合效率。 我们还展示了用于同时适应光束形状和传播方向的印刷自由形式反射镜，并探索了用于光束扩展的多透镜系统。 这一概念为自动化制造具有前所未有的性能和多功能性的光子多芯片组件铺平了道路。 显示英文摘要

摘要： Hybrid photonic integration exploits complementary strengths of different material platforms, thereby offering superior performance and design flexibility in comparison to monolithic approaches. This applies in particular to multi-chip concepts, where components can be individually optimized and tested on separate dies before integration into more complex systems. The assembly of such systems, however, still represents a major challenge, requiring complex and expensive processes for high-precision alignment as well as careful adaptation of optical mode profiles. Here we show that these challenges can be overcome by in-situ nano-printing of freeform beam-shaping elements to facets of optical components. The approach is applicable to a wide variety of devices and assembly concepts and allows adaptation of vastly dissimilar mode profiles while considerably relaxing alignment tolerances to the extent that scalable, cost-effective passive assembly techniques can be used. We experimentally prove the viability of the concept by fabricating and testing a selection of beam-shaping elements at chip and fiber facets, achieving coupling efficiencies of up to 88 % between an InP laser and an optical fiber. We also demonstrate printed freeform mirrors for simultaneously adapting beam shape and propagation direction, and we explore multi-lens systems for beam expansion. The concept paves the way to automated fabrication of photonic multi-chip assemblies with unprecedented performance and versatility.