标题： 光子晶体微环谐振器在混合硅氮化物-铌酸锂平台上的研究 显示英文标题

标题： Photonic Crystal Microring Resonators on a Hybrid Silicon Nitride-on-Lithium Niobate Platform

摘要： 光子晶体谐振器（PhCRs）在用于频率工程应用的非线性集成光子学中得到了广泛应用。基于PhCRs的微波辅助频率转换器突显了其对频率的精确控制（通过周期性PhCR创建一对超级模式实现）和双向频率转换。 在本文中，我们首次展示了在混合硅氮化物-铌酸锂-on-绝缘体（SiN-on-LNOI）平台上的一种高质量PhCR，用于使用电光效应（0.85 pm/V）进行电压驱动的灵活频率转换。 所制造的PhCR具有较大的超级模式分裂带宽= 14.6 GHz和固有品质因子（Q）= 147,000。 在所制造的PhCRs中使用不同的周期性刻蚀幅度可以实现模式分裂的精确控制，模式分裂带宽与刻蚀幅度之间的比值为93.5 MHz/nm。 显示英文摘要

摘要： Photonic-crystal resonators (PhCRs) have been widely used in nonlinear integrated photonics for frequency engineering applications. A microwave-assisted frequency converter based on PhCRs highlights its precise control of frequency (enabled by creation of a pair of supermodes by a corrugated PhCR) and bidirectional frequency conversion. In this paper, we demonstrate a high-quality PhCR on a hybrid silicon nitride-on-lithium niobate-on-insulator (SiN-on-LNOI) platform for the first time for voltage-driven flexible frequency conversion using the electro-optic effect (0.85 pm/V). The fabricated PhCR has a large supermode splitting bandwidth = 14.6 GHz and an intrinsic quality factor (Q) = 147,000. Using different periodic corrugation amplitudes in the fabricated PhCRs enables the precise control of mode splitting with a ratio of 93.5 MHz/nm between the mode splitting bandwidth and the corrugation amplitude.