标题： 微波等离子体离子源的设计与构造 显示英文标题

标题： Design and Construction of a Microwave Plasma Ion Source

摘要： 本论文是关于微波离子源的设计和构建。 离子是在热的高密度氢等离子体中通过微波感应产生的。 等离子体是通过使用频率为2.45 GHz、功率为700 W的微波源产生的。所产生的微波以50 Hz的频率脉冲。 设计和构建的微波系统在石英等离子体腔中产生氢等离子体。 此外，设计和构建了一个离子提取单元，以便从生成的氢等离子体中提取离子。 实现了离子束的提取，并测量了离子电流。 等离子体参数通过双探针确定，离子电流通过法拉第杯测量。 设计的离子提取单元使用设计和构建的离子提取单元的尺寸进行模拟，以追踪提取离子的轨迹。 显示英文摘要

摘要： This thesis is about the designing and constructing a microwave ion source. The ions are generated in a thermal and dense hydrogen plasma by microwave induction. The plasma is generated by using a microwave source with a frequency of 2.45 GHz and a power of 700 W. The generated microwave is pulsing with a frequency of 50 Hz. The designed and constructed microwave system generates hydrogen plasma in a pyrex plasma chamber. Moreover, an ion extraction unit is designed and constructed in order to extract the ions from the generated hydrogen plasma. The ion beam extraction is achieved and ion currents are measured. The plasma parameters are determined by a double Langmuir probe and the ion current is measured by a Faraday cup. The designed ion extraction unit is simulated by using the dimensions of the designed and constructed ion extraction unit in order to trace out the trajectories of the extracted ions.