标题： 真空内的共振弹性软X射线衍射仪 显示英文标题

标题： An in-vacuum diffractometer for resonant elastic soft x-ray scattering

摘要： 我们描述了用于共振弹性软X射线散射和反射率的4圆真空内衍射仪的设计、构造和性能。 该衍射仪安装在加拿大光源的REIXS光束线上，包括由真空内步进电机驱动的9个真空内运动，并在基础压力为2 x10^-10 Torr的超高真空下运行。 通过闭循环低温恒温器提供基础温度为18 K的冷却。 该衍射仪提供了3种光子探测器的选择：光电二极管、通道电子倍增器和二维敏感通道板探测器。 结合可变狭缝和滤光片选项，这些探测器适用于研究具有弱和强衍射信号的广泛现象。 展示了Nd掺杂的(La,Sr)_2CuO_4和薄膜(Ga,Mn)As的衍射和反射率示例测量。 显示英文摘要

摘要： We describe the design, construction and performance of a 4-circle in-vacuum diffractometer for resonant elastic soft x-ray scattering and reflectivity. The diffractometer, installed on the REIXS beamline at the Canadian Light Source, includes 9 in-vacuum motions driven by in-vacuum stepper motors and operates in ultra-high vacuum at base pressure of 2 x10^-10 Torr. Cooling to a base temperature of 18 K is provided with a closed-cycle cryostat. The diffractometer includes a choice of 3 photon detectors: a photodiode, a channeltron and a 2D sensitive channelplate detector. Along with variable slit and filter options, these detectors are suitable for studying a wide range of phenomena having both weak and strong diffraction signals. Example measurements of diffraction and reflectivity in Nd-doped (La,Sr)_2CuO_4 and thin film (Ga,Mn)As are shown.