标题： 嵌套蹦床谐振器在光力学中的应用 显示英文标题

标题： Nested Trampoline Resonators for Optomechanics

摘要： 在开发光机械器件的两个主要挑战是实现低机械和光学损耗率以及从环境中的振动隔离。 我们通过制造由低压化学气相沉积（LPCVD）Si$_3$N$_4$制成的蹦床谐振器，并配备分布式布拉格反射镜（DBR）镜面来解决这两个问题。 我们设计了一种嵌套双谐振器结构，在内部谐振器频率处相对于安装表面实现了80分贝的机械隔离，并且在较低频率下实现了高达45分贝的隔离，与设计一致。 我们在室温下可靠地制造出机械品质因数约为400,000的器件。 此外，这些器件被用于形成精细度高达181,000的光学腔$\pm$ 1,000。 这些有前景的参数将使宏观机械谐振器在量子领域进行实验成为可能。 显示英文摘要

摘要： Two major challenges in the development of optomechanical devices are achieving a low mechanical and optical loss rate and vibration isolation from the environment. We address both issues by fabricating trampoline resonators made from low pressure chemical vapor deposition (LPCVD) Si$_3$N$_4$ with a distributed bragg reflector (DBR) mirror. We design a nested double resonator structure with 80 dB of mechanical isolation from the mounting surface at the inner resonator frequency, and we demonstrate up to 45 dB of isolation at lower frequencies in agreement with the design. We reliably fabricate devices with mechanical quality factors of around 400,000 at room temperature. In addition these devices were used to form optical cavities with finesse up to 181,000 $\pm$ 1,000. These promising parameters will enable experiments in the quantum regime with macroscopic mechanical resonators.