标题： 基于注意力机制的ptycho断层扫描（APT）用于三维纳米级X射线成像，实现最少的数据采集和计算时间 显示英文标题

标题： Attentional Ptycho-Tomography (APT) for three-dimensional nanoscale X-ray imaging with minimal data acquisition and computation time

摘要： 非侵入式 X 射线成像纳米尺度三维物体（例如集成电路 IC）通常需要两种扫描：一种是透射相位断层扫描（ptychographic），它是一种平移扫描，可提供穿过 IC 的复电磁场的估计值；另一种是断层扫描（tomographic scanning），它从多个角度收集复场投影。 在这里，我们提出了注意力型透射相位断层扫描（Attentional Ptycho-Tomography, APT），这是一种经过训练的方法，可以在测量数据不完整的情况下准确重建 IC，并且使用大幅减少的角度数量。训练过程包括基于典型 IC 图案和 X 射线传播物理规律的正则化先验知识。 我们证明，APT 使用 12 倍减少的角度数量即可达到与原始角度集相当的保真度。使用相同减少的角度集，APT 还优于基线重建方法。在我们的实验中，APT 在数据采集和计算方面实现了 108 倍的总减少量，而不会影响质量。 我们预计，我们的物理学辅助机器学习框架也可以应用于纳米级成像的其他分支。 显示英文摘要

摘要： Noninvasive X-ray imaging of nanoscale three-dimensional objects, e.g. integrated circuits (ICs), generally requires two types of scanning: ptychographic, which is translational and returns estimates of complex electromagnetic field through ICs; and tomographic scanning, which collects complex field projections from multiple angles. Here, we present Attentional Ptycho-Tomography (APT), an approach trained to provide accurate reconstructions of ICs despite incomplete measurements, using a dramatically reduced amount of angular scanning. Training process includes regularizing priors based on typical IC patterns and the physics of X-ray propagation. We demonstrate that APT with 12-time reduced angles achieves fidelity comparable to the gold standard with the original set of angles. With the same set of reduced angles, APT also outperforms baseline reconstruction methods. In our experiments, APT achieves 108-time aggregate reduction in data acquisition and computation without compromising quality. We expect our physics-assisted machine learning framework could also be applied to other branches of nanoscale imaging.