标题： 静电力评价对开尔文探针力显微镜横向分辨率的依赖性 显示英文标题

标题： Dependence of Electrostatic Patch Force Evaluation on the Lateral Resolution of Kelvin Probe Force Microscopy

摘要： Kelvin 探针力显微镜（KPFM）被广泛用于测量样品的表面电势，从中可以计算出静电力。 然而，由于 KPFM 测量代表了样品上局部电势的加权平均值，因此评估的准确性严重依赖于该方法的精度和横向分辨率。 本文研究了这种平均效应对静电力估算的影响，使用了解析法和数值方法。 首先，我们推导了静电力位的相关函数，并建立了平行板几何中计算静电力的公式，考虑和不考虑 KPFM 测量效应。 因此，当给出静电力位的统计参数和 KPFM 的横向分辨率时，建立了一种解析方法来确定静电力评估的准确性。 其次，采用数值模拟探索了在更现实的条件下，估算的静电力对 KPFM 横向分辨率的依赖性。 解析和数值结果均表明，静电力估算对静电力特征尺寸、电势波动以及 KPFM 的横向分辨率具有类似的依赖性。 还发现，随着平板间距的增加，静电力低估现象对 KPFM 分辨率的敏感度降低。 本研究的结果可为使用 KPFM 准确评估静电力提供有用的指导。 显示英文摘要

摘要： Kelvin Probe Force Microscopy (KPFM) is widely used to measure the surface potential on samples, from which electrostatic patch force can be calculated. However, since the KPFM measurements represent a weighted average of local potentials on the sample, the accuracy of the evaluation critically depends on the precision and lateral resolution of the method. In this paper, we investigate the influence of this averaging effect on patch force estimations using both analytic and numerical methods. First, we derive the correlation functions of patch potential and establish the formulas for calculating the electrostatic patch forces in the parallel-plate geometry, with and without consideration of the KPFM measurement effect. Thus, an analytic method is established to determine the accuracy of patch force evaluation when the statistical parameters of the patch potential and the lateral resolution of the KPFM are given. Second, numerical simulations are employed to explore the dependence of estimated patch forces on the KPFM's lateral resolution under more realistic conditions. Both analytic and numerical results show a similar dependence of the patch force estimation on the patch characteristic size, potential fluctuation and the lateral resolution of the KPFM. It is also found that the underestimation of the patch force becomes less sensitive to the KPFM's resolution as the separation between plates increases. The results of this study could provide useful guidance for the accurate evaluation of electrostatic patch forces using KPFM.