标题： 一种低温合成具有低转变温度的钨和锶共掺杂的 VO2 薄膜的方法 显示英文标题

标题： A low-temperature synthesis of strongly thermochromic W and Sr co-doped VO2 films with a low transition temperature

摘要： 可逆的二氧化钒（VO2）半导体到金属的转变使得基于VO2的涂层成为热致变色智能窗户的有前景的候选材料，从而减少建筑物的能耗。 我们报告了在1毫米厚的传统钠钙玻璃上，于低温（320摄氏度）下沉积厚度为71-73纳米的热致变色V1-x-yWxSryO2薄膜，沉积在170-175纳米厚的Y稳定ZrO2层上。 开发的沉积技术基于反应性高功率脉冲磁控溅射，采用脉冲O2流量反馈控制，使我们能够在没有任何基板偏压或沉积后退火的情况下制备出所需化学计量比的结晶W和Sr共掺杂VO2薄膜。 VO2的W掺杂将相变温度降低至25摄氏度以下，而VO2的Sr掺杂由于可见光范围光学带隙的拓宽，显著提高了积分发光透射率Tlum，这与薄膜吸收系数的降低一致。 我们讨论了VO2金属亚晶格中Sr含量对V1-x-yWxSryO2薄膜的电子和晶体结构及其温度依赖的光学和电学性质的影响。 优化的V0.855W0.018Sr0.127O2薄膜表现出高的Tlum = 56.8%和太阳能量透射率调制deltaTsol = 8.3%，分别比V0.984W0.016O2薄膜高出1.50倍和1.28倍。 所获得的结果是向低温合成大面积热致变色VO2基涂层以用于未来智能窗户应用的重要一步，因为通过使用280纳米厚的顶部SiO2抗反射层，可以进一步分别将Tlum和deltaTsol提高超过6%和3%。 显示英文摘要

摘要： The reversible semiconductor-to-metal transition of vanadium dioxide (VO2) makes VO2-based coatings a promising candidate for thermochromic smart windows, reducing the energy consumption of buildings. We report low-temperature (320 degC) depositions of thermochromic V1-x-yWxSryO2 films with a thickness of 71-73 nm onto 170-175 nm thick Y-stabilized ZrO2 layers on a 1 mm thick conventional soda-lime glass. The developed deposition technique is based on reactive high-power impulse magnetron sputtering with a pulsed O2 flow feedback control allowing us to prepare crystalline W and Sr co-doped VO2 films of the required stoichiometry without any substrate bias or post-deposition annealing. The W doping of VO2 decreases the transition temperature below 25 degC, while the Sr doping of VO2 increases the integral luminous transmittance, Tlum, significantly due to widening of the visible-range optical band gap, which is consistent with lowering of the absorption coefficient of films. We present the discussion of the effect of the Sr content in the metal sublattice of VO2 on the electronic and crystal structure of V1-x-yWxSryO2 films, and on their temperature-dependent optical and electrical properties. An optimized V0.855W0.018Sr0.127O2 film exhibits a high Tlum = 56.8% and modulation of the solar energy transmittance deltaTsol = 8.3%, which are 1.50 times and 1.28 times, respectively, higher compared with those of the V0.984W0.016O2 film. The achieved results constitute an important step toward a low-temperature synthesis of large-area thermochromic VO2-based coatings for future smart-window applications, as it is easy to further increase the Tlum and deltaTsol by >6% and >3%, respectively, using a 280 nm thick top SiO2 antireflection layer.