标题： 比较压电MEMS执行器的直接驱动和参数驱动性能 显示英文标题

标题： Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators

摘要： 本研究调查并比较了压电驱动的非线性微机电系统（MEMS）设备对直接驱动和退化参量驱动的响应。 我们使用单模态展开描述了压电Duffing型非线性MEMS设备中的退化参量放大区域，并进一步探索了参数空间中可能存在参量激励优于直接驱动的区域，我们将其称为“参量优势”。 分析、实验和数值验证表明，如果总电压预算中同时考虑泵浦电压和信号电压，则参量优势不可能存在。 本研究确定了无量纲的缩放规则，可作为选择退化参量放大最优工作模式的指导原则。 显示英文摘要

摘要： This work investigates and compares the response of piezoelectrically actuated nonlinear microelectromechanical devices (MEMS) to direct and to degenerate parametric drives. We describe the regime of degenerate parametric amplification in piezoelectric Duffing-type nonlinear MEMS devices using a single mode expansion, we then explore the existence of regions in parameter space where parametric excitation maybe advantageous compared to direct drive, which we label "parametric advantage". Analytical, experimental, and numerical verification demonstrates that parametric advantage can not exist if both pump and signal voltages are accounted for in the total voltage budget. This work determines non-dimensional scaling rules that can act as guidelines for selecting an optimal operating regime for degenerate parametric amplification.