标题： 采用三掩膜工艺的2D PZT MEMS谐振扫描仪 显示英文标题

标题： 2D PZT MEMS Resonant Scanner Using a Three-Mask Process

摘要： 本研究展示了新型紧凑型二维（2D）谐振MEMS扫描镜的设计、仿真、制造和表征，该扫描镜由薄膜钛酸铅锆（PZT）驱动。 该器件采用了一种创新的机械耦合双轴架构，在SOI-PZT沉积晶圆上通过三层掩膜工艺制造，显著降低了系统复杂性，同时实现了高性能。 扫描器在7$\times$4.7毫米的芯片内集成了一个1$\times$1.4毫米的椭圆形镜，由优化用于在12伏特$_{\mathrm{p-p}}$周期脉冲驱动下的3.6千赫兹（垂直方向）和54.2千赫兹（水平方向）谐振操作的PZT薄膜元件驱动。 该系统分别在垂直和水平方向上实现了4.8$^\circ$和11.5$^\circ$的光学扫描角度，品质因数分别为750（垂直方向）和1050（水平方向）。 这些值使得扫描带宽-效率积高达 24.2 deg$\cdot$mm$\cdot$kHz（垂直）和 623 deg$\cdot$mm$\cdot$kHz（水平），这是已报道的二维 PZT-MEMS 扫描仪中较高的值之一。 有限元分析证实了应力和镜面变形最小，实验验证表明与仿真结果具有极好的一致性。 该架构通过实现与用于此类系统中的性能水平相当的性能，展示了实现高分辨率激光扫描的可行性，例如在 OCT、LiDAR 和显示等应用中所需要的那样。 显示英文摘要

摘要： This work presents the design, simulation, fabrication, and characterization of a novel architectural compact two-dimensional (2D) resonant MEMS scanning mirror actuated by thin-film lead zirconate titanate (PZT). The device employs an innovative mechanically coupled dual-axis architecture fabricated using a three-mask process on an SOI-PZT deposited wafer, significantly reducing system complexity while achieving high performance. The scanner integrates a 1 $\times$ 1.4 mm oval mirror within a 7 $\times$ 4.7 mm die, actuated by PZT thin-film elements optimized for resonant operation at 3.6 kHz (vertical) and 54.2 kHz (horizontal) under 12 V$_{\mathrm{p-p}}$ periodic pulse driving. The system achieves optical scan angles of 4.8$^\circ$ and 11.5$^\circ$ in vertical and horizontal directions, respectively, with quality factors of 750 (vertical) and 1050 (horizontal). These values contribute to high scanning bandwidth-efficiency products of 24.2 deg$\cdot$mm$\cdot$kHz (vertical) and 623 deg$\cdot$mm$\cdot$kHz (horizontal), among the higher values reported for 2D PZT-MEMS scanners. Finite element analysis confirmed minimal stress and mirror deformation, and experimental validation demonstrated excellent agreement with simulation results. This architecture demonstrates the feasibility of high-resolution laser scanning, as required in applications such as OCT, LiDAR, and displays, by achieving performance levels in line with those used in such systems.