标题： 等离子增强弯曲模式 AlScN 纳米板谐振器作为无冷却和超快红外探测器的高响应性检测器 显示英文标题

标题： Plasmonically Enhanced Flexural-Mode AlScN Nanoplate Resonator as Uncooled and Ultrafast IR Detector with High Responsivity

摘要： 这封信介绍了一类新型的微型化、无冷却和超快速的红外（IR）谐振热探测器（RTDs），其基于30%掺杂的氮化铝钪（AlScN）纳米板。 利用高机电耦合、良好的热性能和增强的及选择性的红外吸收，所提出的器件旨在展示对现有红外RTDs的重大进步。 这个单像素结合了紧凑的占地面积、高光谱选择性和响应度、降低的噪声和快速的热响应，使得通过多像素集成开发创新的红外热成像仪成为可能。 驱动共振模式的弯曲特性最终实现了干涉光学读出，为实现极低的等效噪声功率水平铺平了道路。 这些结果展示了约130 ppt/pW的高红外响应度、约330微秒的热时间常数和大的面外位移。 这项工作代表了首次在共振平台上集成使用AlScN作为介质层的等离子体吸收器的实验。 显示英文摘要

摘要： This letter introduces a novel class of miniaturized, uncooled, and ultra-fast infrared (IR) resonant thermal detectors (RTDs) based on 30%-doped Aluminum Scandium Nitride (AlScN) nanoplates. Exploiting high electromechanical coupling, good thermal properties, and enhanced and selective IR absorption, the presented device aims to demonstrate significant advancements over the state-of-the-art IR RTDs. This single pixel combines compact footprint, high spectral selectivity and responsivity, reduced noise, and fast thermal response, allowing for the potential development of innovative IR thermal imagers through multi-pixel integration. The flexural nature of the actuated resonance mode eventually enables an interferometric optical readout, paving the way towards achieving extremely low Noise Equivalent Power levels. These results demonstrate a high IR responsivity of around 130 ppt/pW, a thermal time constant of around 330 us, and a large out-of-plane displacement. This work represents the first experimental integration on a resonating platform of plasmonic absorbers that utilize AlScN as dielectric layer.