标题： 实时观察使用X射线和紫外光电子能谱的SU-8形成类玻璃碳 显示英文标题

标题： Real time observation of glass-like carbon formation from SU-8 using X-ray and ultraviolet photoelectron spectroscopy

摘要： 在高温下进行热解至1000~$\degree$C，研究了SU-8 3005光刻胶向玻璃状碳结构的结构发展和元素组成的改变，利用\textit{现场}X射线和紫外光电子能谱（XPS/UPS）在超高真空（UHV）条件下进行。 XPS谱图被分析以研究元素组成和物理结构的变化。 测量的C 1s谱图中的峰不对称性被发现是物理结构转变和电导率增加的明显指示器。 \textit{现场}XPS测量有效分离了仅由热解过程引起的氧组成变化。 氧浓度、C 1s峰不对称性和C 1s峰位置是SU-8向导电玻璃状碳过渡的强指示器。 对于热解温度高于500~$\degree$C的SU-8，观察到材料结构和组成向富含碳的导电网络发展，这表明形成了玻璃状碳。 UPS谱图被分析以研究当SU-8层在UHV中加热时次级电子截止（SECO）和价带最大值（VBM）的变化。 SECO和VBM的变化与XPS数据有很好的相关性，并在1000~$\degree$C时观察到零结合能状态。 显示英文摘要

摘要： The structural development and change in elemental composition of SU-8 3005 photoresist into glass-like carbon due to pyrolysis up to 1000~$\degree$C is investigated utilising \textit{in-situ} x-ray and ultraviolet photoelectron spectroscopy (XPS/UPS) under ultra-high vacuum (UHV). XPS spectra were analysed in order to investigate changes to elemental composition and physical structure. Peak asymmetry in the measured C 1s spectra is found to be a clear indicator of a transition in both physical structure and increased electrical conductivity. The \textit{in-situ} XPS measurement of pyrolysis is effective in isolating changes in oxygen composition solely due to the pyrolysis process. Oxygen concentration, C 1s peak asymmetry and C 1s peak positions are strong indicators of semiconducting SU-8 transitioning to conducting glass-like carbon. For SU-8 pyrolysed above temperatures of 500~$\degree$C, a clear development is observed in the material structure and composition towards a carbon rich conducting network indicative of glass-like carbon. UPS spectra were analysed to investigate the changes in secondary electron cut-off (SECO) and valence band maximum (VBM) as the SU-8 layer is heated in UHV. The changes in SECO and VBM correlates well with the XPS data and a zero binding energy state is observed at 1000~$\degree$C.