标题： 掺杂剂位置占据由内层电子损失过滤的、位置平均的会聚束电子衍射确定 显示英文标题

标题： Dopant site occupancy determined by core-loss-filtered, position-averaged convergent beam electron diffraction

摘要： 在弹性散射范围内，探针位置平均的会聚束电子衍射（PACBED）图样已被证明对于估算样品厚度和倾斜误差具有鲁棒性。 通过模拟，我们表明可以利用核心损失过滤的PACBED图样来测量在已知晶体结构中少量掺杂剂的占据位置。 通过利用扫描透射电子显微镜和传统透射电子显微镜之间的互易性，我们采用一种传统用于通过能量色散X射线光谱法确定掺杂浓度的策略来解释核心损失PACBED图样。 我们表明，不同元素之间的相互作用范围差异阻碍了纯粹基于测量的定量策略，但可以通过与推广Cliff-Lorimer k因子的模拟进行比较来克服这一问题。 显示英文摘要

摘要： In the elastic scattering regime, probe position-averaged convergent beam electron diffraction (PACBED) patterns have proven robust for estimating specimen thickness and mistilt. Through simulation, we show that core-loss-filtered PACBED patterns can be used to measure the site occupancy of a small concentration of dopants in an otherwise known crystal structure. By leveraging the reciprocity between scanning and conventional transmission electron microscopy, we interpret core-loss PACBED patterns using a strategy traditionally used for determining dopant concentrations via energy dispersive X-ray spectroscopy. We show that differences in the interaction range of different elements hinder a purely measurement-based quantification strategy, but that this can be overcome through comparison with simulations that generalize the Cliff-Lorimer k-factors.