Title: Microfabricated alkali vapor cells with tunable He-Ne buffer gas mixture using reservoirs with laser-actuated break-seals Show Chinese title

Title: 微制造碱金属蒸气细胞，使用储层中激光驱动的断封阀调节氦-氖缓冲气体混合物

Abstract: This letter reports on the generation of a tunable buffer gas mixture within microfabricated alkali vapor cells. We show that the combination of low-permeation windows with sequential openings of laser-actuated break-seals enables adjustment of a helium-neon (He-Ne) noble gas mixture, fully compatible with alkali metal dispensers. The gas reservoirs and the main cell cavities are initially sealed at the wafer level under distinct helium and neon atmospheres, respectively. Within each cell, after Cs vapor is released from the dispenser, the break-seals are successively actuated to incrementally increase the helium fraction in the buffer gas mixture. This process shifts the atomic clock frequency turnover temperature toward higher values. As an illustration, one of the fabricated cells was operated at 95$^{\circ}$C in a coherent population trapping clock, achieving a fractional frequency stability of 9$\times$10$^{-11}$ at one-day integration time. These results demonstrate the feasibility of precisely tuning buffer gas compositions in microfabricated vapor cells and support the suitability of He-Ne mixtures for miniature atomic clock applications. Show Chinese abstract

Abstract: 这封信报告了在微加工碱金属蒸气腔中生成可调的缓冲气体混合物的情况。 我们表明，低渗透窗口与激光驱动断裂密封的顺序开启相结合，能够调整氦-氖（He-Ne）惰性气体混合物，完全兼容碱金属分配器。 气体储库和主腔室在晶圆级别分别在不同的氦气和氖气气氛下初始密封。 在每个腔室内，当铯蒸气从分配器释放后，依次激活断裂密封以逐步增加缓冲气体混合物中的氦气比例。 这一过程将原子钟频率转折温度向更高值移动。 作为例证，其中一个制造的腔室在相干布居囚禁钟中以95$^{\circ}$C运行，实现了1天积分时间的分数频率稳定度为 9$\times$10$^{-11}$。 这些结果证明了在微加工蒸气腔中精确调节缓冲气体组成的可行性，并支持了He-Ne混合气体在微型原子钟应用中的适用性。