标题： 电子温度、密度和14.5 GHz电子回旋共振离子源的等离子体X射线发射 显示英文标题

标题： Electronic temperatures, densities and plasma X-ray emission of a 14.5 GHz Electron-Cyclotron Resonance Ion Source

摘要： 我们对商用14.5 GHz电子回旋共振离子源等离子体中电子的制动辐射发射进行了系统研究。 通过分析记录的几种稀有气体（氩、氪、氙）的制动辐射光谱随注入功率的变化，测得了电子谱温度以及等离子体中离子和电子密度的乘积。 在我们的不确定范围内，我们发现100W以上的平均温度为48 keV，其与注入功率和气体成分的依赖性较弱。 还确定了提取离子束的电荷态分布，提供了一种区分离子密度和电子密度的方法。 此外，使用高分辨率镶嵌晶体光谱仪观察到了等离子体中高电荷态氩离子的X射线发射，证明了对高电荷态离子跃迁能量进行高精度测量的可行性，特别是对氩离子类氦的磁偶极（M1）跃迁。 显示英文摘要

摘要： We have performed a systematic study of the Bremsstrahlung emission from the electrons in the plasma of a commercial 14.5 GHz Electron-Cyclotron Resonance Ion Source. The electronic spectral temperature and the product of ionic and electronic densities of the plasma are measured by analyzing the Bremsstrahlung spectra recorded for several rare gases (Ar, Kr, Xe) as a function of the injected power. Within our uncertainty, we find an average temperature of ? 48 keV above 100W, with a weak dependency on the injected power and gas composition. Charge state distributions of extracted ion beams have been determined as well, providing a way to disentangle the ionic density from the electronic density. Moreover X-ray emission from highly charged argon ions in the plasma has been observed with a high-resolution mosaic crystal spectrometer, demonstrating the feasibility for high-precision measurements of transition energies of highly charged ions, in particular of the magnetic dipole (M1) transition of He-like of argon ions.