标题： 通过脉冲激光衍射在非吸收性聚合物薄膜中实现超快大区域微结构生成 显示英文标题

标题： Ultrafast Large Area Micropattern Generation in Non-absorbing Polymer Thin-Films by Pulsed Laser Diffraction

摘要： 我们报告了一种超快、并行且超越主模的微图案化技术，用于通过二维周期性孔径对激光光的衍射，对超薄（30 nm-400 nm）非吸收聚合物薄膜进行微图案化。 基底吸收的激光能量的再分布导致聚合物薄膜以类似皱纹的表面起伏结构自组织，这是由于薄膜的局部熔化和冻结引起的。 与传统的激光烧蚀和激光书写工艺不同，采用低激光通量仅被动地膨胀聚合物作为预烧蚀过程，而不会损失材料，并且不会与入射辐射发生吸收或反应。 借助衍射图样的薄聚合物薄膜中的自组织产生由细小凸起线条组成的微结构。 这些规则的微结构具有比掩膜几何形状更复杂的形态，并且非常狭窄的线宽可以比掩膜中的开口小一个数量级。 微结构的形态可以通过改变薄膜厚度、孔径大小和几何形状以及改变衍射图样（例如，通过改变孔径-基底距离）来轻松调节。 显示英文摘要

摘要： We report an ultrafast, parallel and beyond-the-master micro-patterning technique for ultrathin (30 nm-400 nm) non-absorbing polymer films by diffraction of a laser light through a two dimensional periodic aperture. The redistribution of laser energy absorbed by the substrate causes self-organization of polymer thin-film in the form of wrinkle like surface relief structures caused by localized melting and freezing of the thin-film. Unlike the conventional laser ablation and laser writing processes, low laser fluence is employed to only passively swell the polymer as a pre-ablative process without the loss of material, and without absorption/reaction with the incident radiation. Self-organization in the thin polymer film aided by the diffraction pattern produces micro-structures made up of thin raised lines. These regular microstructures have far more complex morphologies than the mask geometry and very narrow line widths that can be an order of magnitude smaller than the openings in the mask. The microstructure morphology is easily modulated by changing the film thickness, aperture size and geometry and by changing the diffraction pattern, e.g., by changing the aperture-substrate distance.