标题： 管内壁非晶碳膜沉积使用大气压脉冲丝状等离子体源 显示英文标题

标题： Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

摘要： 均匀的非晶碳膜沉积在内径为6毫米、外径为8毫米的石英管内表面。 使用脉冲丝状等离子体源进行沉积。 在氩气中加入甲烷，在管内生成长达约140毫米的正放电等离子体丝。 FTIR-ATR、XRD、SEM、LSM和XPS分析得出结论，沉积的薄膜是非晶态的，由非氢化的sp2碳和氢化的sp3碳组成。 使用光学发射光谱、电压-电流测量、显微摄影和数值模拟对等离子体进行表征。 基于观察到的等离子体参数，讨论了薄膜沉积过程的动力学。 显示英文摘要

摘要： Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.