标题： 具有多孔硅基质的共形氮化钛：用于芯片级超级电容器的纳米材料 显示英文标题

标题： Conformal Titanium Nitride in a Porous Silicon Matrix: a Nanomaterial for In-Chip Supercapacitors

摘要： 当今的超级电容器能量存储装置通常是针对印刷电路板和电源应用的离散器件。 自主传感器网络和可穿戴电子设备的发展以及移动设备的微型化将从能量存储与主动器件集成的解决方案中获益显著。 基于多孔硅（PS）的纳米结构由于其极高的固有比表面积与体积比以及与微电子制造工艺的兼容性，为集成提供了一条途径。 不幸的是，原始的PS润湿性有限，在电解质中化学稳定性差，PS基质的高电阻严重限制了功率效率。 在本工作中，我们证明通过原子层沉积在PS基质上涂覆一层超薄的氮化钛，可以获得在水性和有机电解质中的优异润湿性和电化学性能。 我们的方法实现了非常高的比电容（15 F/cm$^3$），能量密度（1.3 mWh/cm$^3$），功率密度（高达214 W/cm$^3$）和优异的稳定性（超过13,000次循环）。 此外，我们展示了PS-TiN纳米材料可以通过结合MEMS和纳米加工技术集成到硅芯片内部。 这实现了片上超级电容器，即它开辟了一种新方法，利用原本不活跃的硅芯片体积来存储能量。 显示英文摘要

摘要： Today's supercapacitor energy storages are typically discrete devices aimed for printed boards and power applications. The development of autonomous sensor networks and wearable electronics and the miniaturisation of mobile devices would benefit substantially from solutions in which the energy storage is integrated with the active device. Nanostructures based on porous silicon (PS) provide a route towards integration due to the very high inherent surface area to volume ratio and compatibility with microelectronics fabrication processes. Unfortunately, pristine PS has limited wettability and poor chemical stability in electrolytes and the high resistance of the PS matrix severely limits the power efficiency. In this work, we demonstrate that excellent wettability and electro-chemical properties in aqueous and organic electrolytes can be obtained by coating the PS matrix with an ultra-thin layer of titanium nitride by atomic layer deposition. Our approach leads to very high specific capacitance (15 F/cm$^3$), energy density (1.3 mWh/cm$^3$), power density (up to 214 W/cm$^3$) and excellent stability (more than 13,000 cycles). Furthermore, we show that the PS-TiN nanomaterial can be integrated inside a silicon chip monolithically by combining MEMS and nanofabrication techniques. This leads to realisation of in-chip supercapacitor, i.e., it opens a new way to exploit the otherwise inactive volume of a silicon chip to store energy.