标题： 用于纳米级定位单量子发射器的低温光致发光成像系统 显示英文标题

标题： Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters

摘要： 我们报告了一种光致发光成像系统，用于相对于对准特征定位单个量子发射器。样品在一个4 K闭循环制冷机中被一个高数值孔径（NA=0.9，100倍$\times$放大率）的物镜探测，该物镜位于制冷机内部，能够在避免因制冷机窗口引起的图像畸变的情况下高效收集发射的光子。在1秒长的采集时间内，在一个$>50$~$\mu$米~$\times$~50~$\mu$米的视场内，单个InAs/GaAs量子点的位置可以以$\approx4.5$纳米的不确定性（标准偏差）确定。这种不确定性是通过量子点发射的最大似然估计定位和确定对准标记中心的互相关方法相结合来确定的。这一位置技术可能是高通量制造依赖于高度受限光学模式与单个量子发射器相互作用的纳米光子器件的重要步骤。 显示英文摘要

摘要： We report a photoluminescence imaging system for locating single quantum emitters with respect to alignment features. Samples are interrogated in a 4~K closed-cycle cryostat by a high numerical aperture (NA=0.9, 100$\times$ magnification) objective that sits within the cryostat, enabling high efficiency collection of emitted photons without image distortions due to the cryostat windows. The locations of single InAs/GaAs quantum dots within a $>50$~$\mu$m~$\times$~50~$\mu$m field of view are determined with $\approx4.5$~nm uncertainty (one standard deviation) in a 1~s long acquisition. The uncertainty is determined through a combination of a maximum likelihood estimate for localizing the quantum dot emission, and a cross-correlation method for determining the alignment mark center. This location technique can be an important step in the high-throughput creation of nanophotonic devices that rely upon the interaction of highly confined optical modes with single quantum emitters.