标题： TiAu TES 32像素阵列：不同X射线能量下的均匀性、热串扰和性能$\times$32 显示英文标题

标题： TiAu TES 32$\times$32 pixel array: uniformity, thermal crosstalk and performance at different X-ray energies

摘要： Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of $\mathrm{\Delta}E<$3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. 在这篇贡献中，我们报道了一种均匀的 32$\times$32 像素阵列的发展及其特性，该阵列的（长度$\times $宽度）为 140$\times$30 $\mu$米$^2$的 TiAu 热电堆探测器，这些探测器具有用于 X 射线光子的\textcolor{black}{一个 2.3 $\mu$米} 厚 Au 吸收体。 像素具有典型的正常电阻，$R_\mathrm{n}$ = 121 m$\Omega$，临界温度$T_\mathrm{c}\sim$为90 mK。为了展示阵列的均匀性，我们对阵列中的60个像素进行了广泛的测量。我们在单像素模式下，以从1到5 MHz的交流偏置频率，在5.9 keV能量处测得的能量分辨率在2.4到2.6 eV（FWHM）之间，使用了由SRON/VTT开发的频域复用（FDM）读出系统。我们还展示了在X射线中，不同光子能量下探测器的能量分辨率，这些光子能量由一个调制的外部X射线源生成，范围从1.45 keV到8.9 keV。为了评估热串扰对仪器能量分辨率预算要求的影响，也进行了多个像素的复用读出。当考虑串扰信号幅度与X射线脉冲（例如在5.9 keV时）幅度之比时，该值导致第一邻近像素的派生要求小于1 $\times$ 10 $^{-3}$。 显示英文摘要

摘要： Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of $\mathrm{\Delta}E<$3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. In this contribution, we report on the development and the characterization of a uniform 32$\times$32 pixel array with (length$\times $width) 140$\times$30 $\mu$m$^2$ TiAu TESs, which have \textcolor{black}{a 2.3 $\mu$m} thick Au absorber for X-ray photons. The pixels have a typical normal resistance $R_\mathrm{n}$ = 121 m$\Omega$ and a critical temperature $T_\mathrm{c}\sim$ 90 mK. We performed extensive measurements on 60 pixels out of the array in order to show the uniformity of the array. We obtained an energy resolutions between 2.4 and 2.6 eV (FWHM) at 5.9 keV, measured in a single-pixel mode at AC bias frequencies ranging from 1 to 5 MHz, with a frequency domain multiplexing (FDM) readout system, which is developed at SRON/VTT. We also present the detector energy resolution at X-ray with different photon energies generated by a modulated external X-ray source from 1.45 keV up to 8.9 keV. Multiplexing readout across several pixels has also been performed to evaluate the impact of the thermal crosstalk to the instrument's energy resolution budget requirement. This value results in a derived requirement, for the first neighbour, that is less than 1$\times$10$^{-3}$ when considering the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 5.9 keV)