标题： 光学在扫描电子显微镜中的点扩散函数 显示英文标题

标题： Point-Spread Function of the Optics in Scanning Electron Microscopes

摘要： 探针成像光学（$PSF_{optics} $）的点扩散函数首次在未校正（无多极校正器）扫描电子显微镜（SEM）中被报道。 在SEM中，电子探针信息在束与样品相互作用时丢失。 我们展示了如何从重构的探针强度估计中恢复探针相位信息。 使用受控失焦来捕获碳（$\mathrm C $）薄膜上$28.5\;nm $金（$\mathrm{Au} $）纳米颗粒（$\mathrm{NPs} $）的焦系列SEM图像。 这些图像被用来重构各自的探针强度，以创建一个探针强度的焦系列，该系列作为相位检索管道的输入。 利用样品平面上电子探针波函数的完整描述（强度和相位），我们报告了多个数据集在束能$E\;=20\;keV\; $的$PSF_{optics} $。 这项工作为扫描电子显微镜中一种替代的像差校正和无像差成像方法打开了新的可能性。 显示英文摘要

摘要： Point-spread function of the probe forming optics ($PSF_{optics} $) is reported for the first time in an uncorrected (without multipole correctors) scanning electron microscope (SEM). In an SEM, the electron probe information is lost as the beam interacts with the specimen. We show how the probe phase information can be recovered from reconstructed probe intensity estimates. Controlled defocus was used to capture a focal-series of SEM images of $28.5\;nm $ gold ($\mathrm{Au} $) nanoparticles ($\mathrm{NPs} $) on a carbon ($\mathrm C $) film. These images were used to reconstruct their respective probe intensities to create a focal-series of probe intensities, which were the input to the phase retrieval pipeline. Using the complete description (intensity and phase) of the electron probe wavefunction at the specimen plane, we report the $PSF_{optics} $ for multiple data sets for beam energy $E\;=20\;keV\; $. This work opens up new possibilities for an alternative way of aberration correction and aberration-free imaging in scanning electron microscopy.