标题： 增强铁电稳定性：外延HfO2/ZrO2超晶格中的宽范围自适应控制 显示英文标题

标题： Enhancing ferroelectric stability: Wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattices

摘要： 尽管HfO2的极相具有良好的与互补金属氧化物半导体工艺的兼容性，但其亚稳性仍然是其工业应用中的关键障碍。 传统的稳定方法，如掺杂，通常会引入晶体缺陷，并对铁电HfO2薄膜的厚度施加限制。 这些限制使得铁电性能容易退化，特别是由于工作条件下的相变。 在这里，我们展示了高质量外延（HfO2）n/(ZrO2)n超晶格中稳健的铁电性，这些超晶格在扩展的厚度范围内表现出显著增强的铁电稳定性。 优化周期的超晶格可从高达100 nm的厚度保持稳定的铁电性，出色的疲劳电阻超过109次切换循环，并且矫顽场低至约0.85 MV/cm。 第一性原理计算表明，相变的动能势垒和界面形成能是抑制非极相形成的至关重要的因素。 这项工作建立了一个通用的平台，用于探索高性能萤石结构超晶格，并推动了基于HfO2的铁电材料在更广泛的应用领域的集成。 显示英文摘要

摘要： The metastability of the polar phase in HfO2, despite its excellent compatibility with the complementary metal-oxide-semiconductor process, remains a key obstacle for its industrial applications. Traditional stabilization approaches, such as doping, often induce crystal defects and impose constraints on the thickness of ferroelectric HfO2 thin films. These limitations render the ferroelectric properties vulnerable to degradation, particularly due to phase transitions under operational conditions. Here, we demonstrate robust ferroelectricity in high-quality epitaxial (HfO2)n/(ZrO2)n superlattices, which exhibit significantly enhanced ferroelectric stability across an extended thickness range. Optimized-period superlattices maintain stable ferroelectricity from up to 100 nm, excellent fatigue resistance exceeding 109 switching cycles, and a low coercive field of ~0.85 MV/cm. First-principles calculations reveal that the kinetic energy barrier of phase transition and interfacial formation energy are crucial factors in suppressing the formation of non-polar phases. This work establishes a versatile platform for exploring high-performance fluorite-structured superlattices and advances the integration of HfO2-based ferroelectrics into a broader range of applications.