标题： 低温下用于量子计算应用的商用SP4T微机电开关的性能评估 显示英文标题

标题： Cryogenic Performance Evaluation of Commercial SP4T Microelectromechanical Switch for Quantum Computing Applications

摘要： 超导量子计算机已成为下一代计算的领先平台，提供了卓越的可扩展性和前所未有的计算速度。 然而，将这些系统扩展到数百万个量子比特以用于实际应用带来了重大挑战，特别是由于互连瓶颈。 为解决这一挑战，大量研究集中于开发低温多路复用器，使室温电子设备与量子处理器之间的布线最小化。 本文研究了商用微机电系统（MEMS）开关在大规模量子计算系统中的低温多路复用器的可行性。 通过有限元仿真和实验测量，在低温条件（<10 K）下评估了MEMS开关的直流和射频特性。 我们的结果表明，MEMS开关在低温下表现出改进的导通电阻、较低的工作电压和优越的射频性能，并且能够在1亿次循环以上可靠运行。 此外，在低温条件下实现了稳定的单刀四掷（SP4T）切换和逻辑操作，包括与非门和或非门，验证了其在量子计算中的潜力。 这些结果突显了MEMS开关在实现大规模量子计算系统方面的前景。 显示英文摘要

摘要： Superconducting quantum computers have emerged as a leading platform for next-generation computing, offering exceptional scalability and unprecedented computational speeds. However, scaling these systems to millions of qubits for practical applications poses substantial challenges, particularly due to interconnect bottlenecks. To address this challenge, extensive research has focused on developing cryogenic multiplexers that enable minimal wiring between room-temperature electronics and quantum processors. This paper investigates the viability of commercial microelectromechanical system (MEMS) switches for cryogenic multiplexers in large-scale quantum computing systems. DC and RF characteristics of the MEMS switches are evaluated at cryogenic temperatures (< 10 K) through finite element simulations and experimental measurements. Our results demonstrate that MEMS switches exhibit improved on-resistance, lower operating voltage, and superior RF performance at cryogenic temperatures, with reliable operation over 100 million cycles. Furthermore, stable single-pole four-throw (SP4T) switching and logical operations, including NAND and NOR gates, are demonstrated at cryogenic temperatures, validating their potential for quantum computing. These results underscore the promise of MEMS switches in realizing large-scale quantum computing systems.