标题： 对非晶态和多晶态MoS2的比较纳米摩擦学研究 显示英文标题

标题： A comparative nanotribological investigation on amorphous and polycrystalline forms of MoS2

摘要： 两种通过磁控溅射制备的非晶和多晶MoS2的磨损行为在结合纳米压痕和原子力显微镜的研究中得到了表征。 从使用Berkovich压头和最大载荷为2 mN的划痕后表面磨损轨迹的深度和宽度分析中，我们得出结论，这两种形式都遵循Archard磨损方程，且非晶MoS2的耐磨性大约是多晶MoS2的四倍。 此外，对原始区域和磨损区域的侧向力图进行比较显示，两种形式的摩擦都有显著降低，这可能是由于划痕导致的表面明显平整化。 由于正常力在微牛范围，磨损轨迹的线性尺寸与形成表面的颗粒结构尺寸相当，使得分析变得困难。 即使在这种情况下无法验证Archard方程，非晶MoS2在纳米尺度上的耐磨性也明显优于多晶MoS2。 通过这种方式，我们的结果揭示了不同于文献中通常讨论的层状结构的MoS2薄膜的纳米摩擦学信息。 非晶形式表现优于多晶形式。 显示英文摘要

摘要： The wear behavior of two amorphous and polycrystalline forms of MoS2 prepared by magnetron sputtering has been characterized in a combined nanoindentation and atomic force microscopy study. From the analysis of the depth and width of wear tracks estimated after scratching the surfaces with a Berkovich indenter and a loading force up to 2 mN, we conclude that both forms follow the Archard wear equation, and the wear resistance is about four times higher on the amorphous MoS2. Moreover, a comparison of lateral force maps on pristine and worn areas shows a considerable reduction of friction on both forms, which is possibly due to the significant smoothing of the surfaces caused by scratching. With normal forces in the micro N range, the analysis is made difficult by the fact that the linear dimensions of the wear tracks are comparable to those of the granular structures forming the surfaces. Even if the Archard equation could not be tested in this case, the wear resistance is considerably larger on amorphous MoS2 also on the nanoscale. In this way, our results disclose information on the nanotribology of MoS2 thin films in forms different from the layered structures commonly discussed in the literature. The amorphous form outperforms the polycrystalline one.