标题： 利用硅的各向异性蚀刻制作金字塔形微镜 显示英文标题

标题： Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon

摘要： 金微镜在硅中形成了倒置的金字塔形状。 金字塔结构是通过在氢氧化钾中进行各向异性蚀刻，在硅晶圆的(100)表面上形成的。 然后通过在金字塔的平滑硅(111)面上溅射金，形成高质量的微镜。 这些镜子在作为适合集成到MOEMS系统的高质量光学器件方面显示出很大的潜力。 显示英文摘要

摘要： Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.