标题： 通过聚焦离子束的钻石加工 - 表面损伤与恢复 显示英文标题

标题： Diamond Processing by Focused Ion Beam - Surface Damage and Recovery

摘要： 氮空位色心（NV-）在金刚石中对于新型光子应用具有重要意义。 金刚石纳米光子结构通常使用聚焦离子束（FIB）加工实现，这会导致表面受损，对色心发光产生不利影响。 通过飞行时间二次离子质谱（TOF-SIMS）和光致发光（PL）研究了FIB加工对单晶金刚石表面及其光子特性的影响。 将加工后的表面暴露于氢等离子体，随后进行化学蚀刻，显著降低了植入的Ga浓度，从而恢复了NV-的光发射，并显著提高了NV-/NV0的比率。 显示英文摘要

摘要： The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a detrimental effect on the color center luminescence. The FIB processing effect on single crystal diamond surfaces and their photonic properties is studied by Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and photoluminescence (PL). Exposing the processed surface to hydrogen plasma, followed by chemical etching, drastically decreases implanted Ga concentration, resulting in a recovery of the NV- photo-emission and in a significant increase of the NV-/NV0 ratio.