标题： 光学机械圆盘谐振器在空气中振动的阻尼 显示英文标题

标题： Damping of optomechanical disks resonators vibrating in air

摘要： 我们报告了在射频范围内在空气中振动的微型GaAs盘式光机共振器。 通过扫描电子显微镜和光学干涉测量研究了盘的弯曲模式，并用环形板的弹性理论正确建模。 系统地测量了机械阻尼，并与原始的空气阻尼分析模型进行对比。 推导出的公式能够正确再现机械模式和阻尼行为，可作为流体环境中光机应用的设计工具。 显示英文摘要

摘要： We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.