标题： 一种用于简单精确测量薄膜复折射率和厚度的新方案 显示英文标题

标题： A novel scheme for simple and precise measurement of the complex refractive index and thickness of thin films

摘要： 我们演示了一种新方案的应用，该方案用于通过分析单片折叠式法布里-珀罗腔（MFC）反射点处的相对相位差和反射比来测量薄膜的折射率和厚度。根据菲涅耳公式计算复折射率和厚度。结果显示，与常规椭偏仪相比，所提出的方法在准确性上有很大提高，并且操作过程简单明了。 显示英文摘要

摘要： We demonstrate applications of a novel scheme which is used for measuring refractive index and thickness of thin film by analyzing the relative phase difference and reflected ratio at reflection point of a monolithic folded Fabry-Perot cavity (MFC). The complex refractive index and the thickness are calculated according to the Fresnel formula. Results show that the proposed method has a big improvement in accuracy with simple and clear operating process compared with the conventional Ellipsometry.