标题： 用于高复用因子的瓷砖和修剪微谐振器阵列制造优化 显示英文标题

标题： Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors

摘要： 我们提出了一种可扩展、可重新配置的超导微谐振器阵列制造方法，并针对高复用因子进行了优化。 该方法使用在步进光刻掩模上图案化的均匀尺寸的瓷砖作为阵列的构建模块。 我们在一个由氮化钛超导薄膜制成的101单元微波动能电感探测器（MKID）阵列上展示了该技术。 表征结果显示，由于在晶圆上平滑变化的材料参数，最大分数频率间隔偏差为1.5%。 然而，局部偏差在分数频率间隔中呈现高斯分布，标准差为$2.7 \times 10^{-3}$。 我们利用这一发现，在BLAST-TNG$250 \; \mu\text{m}$生产晶圆上通过在物理空间和频率空间中靠近的区域放置谐振器来提高产量。 该阵列包含1836个偏振敏感的MKID，以三个复用组连接。 我们介绍了阵列设计，并表明实现的良率与我们的频率碰撞模型一致，并与其他低温探测器技术所实现的水平相当。 显示英文摘要

摘要： We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7 \times 10^{-3}$. We exploit this finding to increase the yield of the BLAST-TNG $250 \; \mu\text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.