标题： 超薄一体化自旋霍尔磁传感器，通过自旋电流实现内置交流激励 显示英文标题

标题： Ultrathin All-in-one Spin Hall Magnetic Sensor with Built-in AC Excitation Enabled by Spin Current

摘要： 磁阻（MR）传感器为多种工业和消费应用提供了具有成本效益的解决方案，包括物联网（IoT）、人工智能和智能生活等新兴领域。商用MR传感器，如各向异性磁阻（AMR）传感器、巨磁阻（GMR）传感器和隧道磁阻（TMR）传感器，通常需要适当的磁场偏置以实现输出线性化和噪声抑制，导致结构复杂性和制造成本增加。在此，我们展示了一种集成交流激励和整流检测的全功能自旋霍尔磁阻（SMR）传感器，该传感器有效消除了任何与主动传感层分离的线性化和畴稳定机制的需求。这是通过超薄NiFe/Pt双层中SMR和自旋轨道扭矩（SOT）的共存实现的。尽管结构最为简单，所制造的惠斯通电桥传感器表现出基本上为零的直流偏移、可忽略的滞后效应，并在1Hz时具有约1nT/sqrt(Hz)的检测灵敏度。此外，它还表现出与GMR和TMR相似的外部场角度依赖性，尽管它没有任何参考层（不同于GMR和TMR）。SMR传感器的优异性能在旋转角度测量的概念验证实验以及振动和手指运动检测中得到了明显证明。 显示英文摘要

摘要： Magnetoresistance (MR) sensors provide cost-effective solutions for diverse industrial and consumer applications, including emerging fields such as internet-of-things (IoT), artificial intelligence and smart living. Commercially available MR sensors such as anisotropic magnetoresistance (AMR) sensor, giant magnetoresistance (GMR) sensor and tunnel magnetoresistance (TMR) sensors typically require an appropriate magnetic bias for both output linearization and noise suppression, resulting in increased structural complexity and manufacturing cost. Here, we demonstrate an all-in-one spin Hall magnetoresistance (SMR) sensor with built-in AC excitation and rectification detection, which effectively eliminates the requirements of any linearization and domain stabilization mechanisms separate from the active sensing layer. This was made possible by the coexistence of SMR and spin-orbit torque (SOT) in ultrathin NiFe/Pt bilayers. Despite the simplest possible structure, the fabricated Wheatstone bridge sensor exhibits essentially zero DC offset, negligible hysteresis, and a detectivity of around 1nT/sqrt(Hz) at 1Hz. In addition, it also shows an angle dependence to external field similar to those of GMR and TMR, though it does have any reference layer (unlike GMR and TMR). The superior performances of SMR sensors are evidently demonstrated in the proof-of-concept experiments on rotation angle measurement, and vibration and finger motion detection.