标题： 集成共线折射率传感器与Ge PIN光电二极管 显示英文标题

标题： Integrated collinear refractive index sensor with Ge PIN photodiodes

摘要： 折射率传感是一种高度敏感且无需标记的分子结合事件检测方法。 基于等离子体共振的生物传感概念的商业实现通常需要大量的外部仪器，例如显微镜和光谱仪。 很少有概念是基于将等离子体纳米结构直接集成到光电设备中以实现芯片级集成的。 在这里，我们提出了一种与CMOS兼容的折射率传感器，该传感器由Ge异质结构PIN二极管与等离子体纳米孔阵列组成，并直接结构化在二极管Al接触金属化层中。 在我们的器件中，可以在简单的顶部照射下使用光电流来检测表面折射率变化，而无需信号放大电路的帮助。 我们的器件在体折射率传感中表现出大于1000 nm每折射率单位的高灵敏度，并可作为原型，利用CMOS平台的成本效益来开发超紧凑、低成本的生物传感器。 显示英文摘要

摘要： Refractive index sensing is a highly sensitive and label-free detection method for molecular binding events. Commercial implementations of biosensing concepts based on plasmon resonances typically require significant external instrumentation such as microscopes and spectrometers. Few concepts exist that are based on direct integration of plasmonic nanostructures with optoelectronic devices for on-chip integration. Here, we present a CMOS-compatible refractive index sensor consisting of a Ge heterostructure PIN diode in combination with a plasmonic nanohole array structured directly into the diode Al contact metallization. In our devices, the photocurrent can be used to detect surface refractive index changes under simple top illumination and without the aid of signal amplification circuitry. Our devices exhibit large sensitivities > 1000 nm per refractive index unit in bulk refractive index sensing and could serve as prototypes to leverage the cost-effectiveness of the CMOS platform for ultra-compact, low-cost biosensors.