标题： 基于第一性原理的X射线活性光学：设计与验证 显示英文标题

标题： A First-Principle Approach to X-ray Active Optics: Design and Verification

摘要： 本文提出了用于X射线主动光学的原理设计方法，使用模拟-调制循环代替传统主动光学中使用的测量-调制反馈回路。因此，新的主动光学有望在表面形状计量仪器的精度上取得超越。我们应用了一个具有局部热弹性变形的X射线镜来验证这一想法。有限元模拟和表面形状测量均表明，可以在原子层面上实现主动光学调制精度极限。人们认为，原理设计策略的实施有潜力彻底改变X射线镜的制造工艺和同步辐射束线工程。 显示英文摘要

摘要： This paper presents the first-principle design approach for X-ray active optics, using the simulation-modulation cycle in place of the measurement-modulation feedback loops used in traditional active optics. Hence, the new active optics have the potential to outperform the accuracy of surface-shape metrology instruments. We apply an X-ray mirror with localized thermal elastic deformation to validate the idea. Both the finite element simulations and surface shape measurements have demonstrated that the active optics modulation accuracy limit can be achieved at the atomic layer level. It is believed that the implementation of the first-principle design strategy has the capacity to revolutionize both the manufacturing processes of X-ray mirrors and the beamline engineering of synchrotron radiation.