标题： 用于亚微米波长应用的异质氧化钽光子集成电路 显示英文标题

标题： Heterogeneous tantala photonic integrated circuits for sub-micron wavelength applications

摘要： 原子和离子阱系统是新一代基于量子的定位、导航和定时（PNT）技术的支柱。 这种量子系统的微型化带来了巨大的技术优势，尤其是系统尺寸、重量和功耗的减少。 然而，由于缺乏适合这些仪器的紧凑型独立光子集成电路（PICs），这一进展受到了限制。 要实现这种光子系统的移动性，需要在亚微米波长下开发完全集成的片上主动组件。 我们展示了基于InGaAs量子阱主动区域与五氧化二钽被动组件的晶圆级键合，在980 nm波长下工作的异构光子集成电路。 这种高良率工艺提供了> 95%的表面面积良率，并能够在76.2 mm（3英寸）的硅片上集成> 1300个主动组件。 我们展示了一系列功能，包括半导体光放大器、法布里-珀罗激光器以及具有43 dB边模抑制比和> 250 GHz单模调谐范围的分布反馈激光器。 我们通过在同一流程上制造的微环谐振器中泵浦光学参量振荡过程，测试了片上激光器的精确波长控制和系统级功能，生成了波长为778 nm和752 nm的短波信号。 这些结果为实现基于原子和离子阱系统的紧凑量子传感器的全功能集成光子引擎提供了途径。 显示英文摘要

摘要： Atomic and trapped-ion systems are the backbone of a new generation of quantum-based positioning, navigation, and timing (PNT) technologies. The miniaturization of such quantum systems offers tremendous technological advantages, especially the reduction of system size, weight, and power consumption. Yet, this has been limited by the absence of compact, standalone photonic integrated circuits (PICs) at the wavelengths suitable for these instruments. Mobilizing such photonic systems requires development of fully integrated, on-chip, active components at sub-micrometer wavelengths. We demonstrate heterogeneous photonic integrated circuits operating at 980 nm based on wafer-scale bonding of InGaAs quantum well active regions to tantalum pentoxide passive components. This high-yield process provides > 95 % surface area yield and enables integration of > 1300 active components on a 76.2 mm (3 inch) silicon wafer. We present a diverse set of functions, including semiconductor optical amplifiers, Fabry-Perot lasers, and distributed feedback lasers with 43 dB side-mode suppression ratio and > 250 GHz single-mode tuning range. We test the precise wavelength control and system level functionality of the on-chip lasers by pumping optical parametric oscillation processes in microring resonators fabricated on the same platform, generating short-wavelength signals at 778 nm and 752 nm. These results provide a pathway to realize fully functional integrated photonic engines for operation of compact quantum sensors based on atomic and trapped-ion systems.