标题： 在光子代工厂中实现光子晶体谐振器频率梳 显示英文标题

标题： Implementing photonic-crystal resonator frequency combs in a photonics foundry

摘要： 我们探索了AIM Photonics的氮化硅平台，以制造用于生成光学参量振荡器（OPO）和孤子微波梳的光子晶体谐振器。 我们的方法利用了在大尺寸硅晶圆上氮化硅工艺的可扩展性和精细特征尺寸，以实现低损耗、高Q值的微谐振器，这些微谐振器通过纳米级的光子晶体结构进行功能化。 我们展示了在300毫米硅晶圆上完整的代工制造下，微谐振器的本征质量因子高达1.2*10^7，包括700纳米厚的氮化硅器件层和复杂纳米光子学的集成。 这些特性使得该平台能够实现一系列非线性纳米光子源，包括OPO、微波梳、参量放大器、压缩光生成器和单光子源。 通过精细调整光子晶体设计参数，我们实现了OPO输出频率的广泛可调性，覆盖了近红外的很大一部分。 此外，我们观察到了由微谐振器精确色散工程所支持的孤子频率梳的形成。 这些结果突显了广泛可及的、光刻图案化的氮化硅光子学在实现频率梳源的广泛接入和复杂集成方面的潜力，其应用包括光谱分析、计量学和通信。 显示英文摘要

摘要： We explore an AIM Photonics silicon-nitride platform to fabricate photonic-crystal resonators for generating optical parametric oscillators (OPO) and soliton microcombs. Our approach leverages the scalability and fine feature size of silicon-nitride processing on large-scale silicon wafers to achieve low-loss, high-Q microresonators, functionalized by nano-scale photonic-crystal structures. We demonstrate intrinsic microresonator quality factor up to 1.2*10^7 with complete foundry fabrication on 300 mm silicon, a 700 nm thick silicon-nitride device layer, and inclusion of complex nanophotonics. These features enable a host of nonlinear nanophotonics sources on the platform, including OPOs, microcombs, parametric amplifiers, squeezed-light generators, and single-photon sources. By fine-tuning the photonic-crystal design parameters, we achieve broad tunability in the frequency of the OPO output, spanning a significant portion of the near-infrared. Additionally, we observe the formation of soliton frequency combs, enabled by the precise dispersion engineering of the microresonators. These results highlight the potential of widely accessible, photolithographically patterned, silicon-nitride photonics to enable wide access to and complex integration of frequency-comb sources, with applications in spectroscopy, metrology, and communications.