标题： 基于（La，Sr）MnO3 单晶薄膜的磁性蹦床谐振器 显示英文标题

标题： Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films

摘要： 基于磁性元件的微机电谐振器已被提出用于磁场传感应用，但将磁性材料与标准半导体化合物集成具有挑战性，并需要复杂的制造工艺。 我们提出了一种不同的方法，依赖于(La0.7,Sr0.3)MnO3 (LSMO)，这是一种既作为谐振器的结构元件又作为功能磁层的氧化物化合物。 悬浮跳板通过单步工艺从LSMO薄膜中实现，其品质因数高达60k，fQ乘积达到10$^{10}$ Hz。 它们的磁性通过SQUID磁强计和磁力显微镜进行探测，在室温下显示出240 kA/m的饱和磁化强度和2.5 mT矫顽力的面内磁畴。 由于完全由磁性材料制成，这些谐振器相比其他解决方案具有更大的磁相互作用体积，使其成为高灵敏度磁场传感器的理想构建模块。 显示英文摘要

摘要： Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as structural element for the resonator and functional magnetic layer. Suspended trampolines are realized in a single step process from LSMO thin films and show quality factor up to 60k and fQ products reaching 10$^{10}$ Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.