标题： 用于多轴坐标定位的单片干涉模块，具有亚纳米精度 显示英文标题

标题： Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision

摘要： 我们报告了开发、表征和验证一种紧凑的单片激光干涉装置，该装置专为坐标定位系统中的高精度两轴和三轴位移测量而设计。 设计目标 用于先进精密运动平台的OEM集成，包括纳米计量仪器、半导体制造设备和超高真空（UHV）环境。 使用单一激光源，该装置将多个干涉仪集成到单片L形基座框架中，能够在X-Y运动系统中实现亚纳米周期性误差，同时最大限度地减少几何和热不稳定性。 预对齐和预调整的架构简化了集成，提高了长期稳定性，并确保了一致的计量性能。 系统的验证协议采用正交相位分析和系统误差指标来表征性能并优化装配。 结果表明该系统具有亚纳米测量能力，并表明该系统适用于在先进坐标计量应用中进行可扩展实施。 显示英文摘要

摘要： We report on developing, characterizing, and verifying a compact, monolithic laser interferometric assembly designed for high-precision two- and three-axis displacement measurements in coordinate positioning systems. The design targets OEM integration into advanced precision motion platforms, including nanometrology instruments, semiconductor manufacturing equipment, and ultra-high vacuum (UHV) environments. Using a single laser source, the assembly integrates multiple interferometers into a monolithic L-shaped base frame, enabling sub-nanometer periodic error in X-Y motion systems while minimizing geometric and thermal instabilities. The pre-aligned and pre-adjusted architecture simplifies integration, enhances long-term stability, and ensures consistent metrological performance. The system's verification protocol employs quadrature phase analysis and systematic error metrics to characterize performance and optimise assembly. The results indicate sub-nanometer measurement capability and suggest the system's suitability for scalable implementation in advanced coordinate metrology applications.