标题： 一种空间物理信息模型用于SQUID显微镜扫描的三维螺旋样本 显示英文标题

标题： A Spatial-Physics Informed Model for 3D Spiral Sample Scanned by SQUID Microscopy

摘要： 先进的封装技术在半导体制造行业中至关重要。 然而，由于涉及的层深度和复杂性，先进封装的无损检测（NDT）变得越来越具有挑战性。 在这种情况下，磁场成像（MFI）能够对电流产生的磁场进行成像。 为了使MFI在NDT中有效，必须将磁场转换为电流密度。 这种转换通常仅依赖快速傅里叶变换（FFT）进行磁场反演；然而，现有的方法没有考虑涡流效应或测试设置中的图像错位。 在本文中，我们提出了一种空间物理信息模型（SPIM），用于使用超导量子干涉装置（SQUID）显微镜扫描的三维螺旋样品。 SPIM包含三个关键组件：i）通过将所有“尖锐”导线场信号对齐，利用同相（I通道）和正交相（Q通道）图像来减轻涡流效应，从而增强磁场图像；ii）磁场图像对齐，解决由于扫描SQUID显微镜相对于导线段的任何错位引起的倾斜效应；iii）一种将磁场转换为磁流的方法，通过将毕奥-萨伐尔定律与FFT结合。 结果表明，SPIM使I通道的尖锐度提高了0.3%，并减少了Q通道尖锐度25%。 此外，我们在真实图像中消除了0.30的旋转和倾斜错位。 总体而言，SPIM突显了将空间分析与物理驱动模型相结合在实际应用中的潜力。 显示英文摘要

摘要： The development of advanced packaging is essential in the semiconductor manufacturing industry. However, non-destructive testing (NDT) of advanced packaging becomes increasingly challenging due to the depth and complexity of the layers involved. In such a scenario, Magnetic field imaging (MFI) enables the imaging of magnetic fields generated by currents. For MFI to be effective in NDT, the magnetic fields must be converted into current density. This conversion has typically relied solely on a Fast Fourier Transform (FFT) for magnetic field inversion; however, the existing approach does not consider eddy current effects or image misalignment in the test setup. In this paper, we present a spatial-physics informed model (SPIM) designed for a 3D spiral sample scanned using Superconducting QUantum Interference Device (SQUID) microscopy. The SPIM encompasses three key components: i) magnetic image enhancement by aligning all the "sharp" wire field signals to mitigate the eddy current effect using both in-phase (I-channel) and quadrature-phase (Q-channel) images; (ii) magnetic image alignment that addresses skew effects caused by any misalignment of the scanning SQUID microscope relative to the wire segments; and (iii) an inversion method for converting magnetic fields to magnetic currents by integrating the Biot-Savart Law with FFT. The results show that the SPIM improves I-channel sharpness by 0.3% and reduces Q-channel sharpness by 25%. Also, we were able to remove rotational and skew misalignments of 0.30 in a real image. Overall, SPIM highlights the potential of combining spatial analysis with physics-driven models in practical applications.