标题： 中红外传感应用中量子级联激光器与硅上锗波导的混合集成 显示英文标题

标题： Hybrid Integration of Quantum Cascade Lasers with Germanium-on-Silicon waveguides for Mid-Infrared Sensing Applications

摘要： 我们提出了一种新型方案，将量子级联激光器条与在中红外波段工作的硅上锗波导进行混合集成。 激光条通过倒装芯片键合技术直接键合到硅上锗目标芯片上，无需主动对准，在脉冲操作下实现了高达45%（3.5分贝损耗）的端面耦合效率。 光学功率估算表明，有20-30毫瓦的光功率耦合进入波导。 被动对准方法结合CMOS兼容的光子集成电路制造工艺，为实现传感、自由空间通信以及新型光源的全集成中红外光子系统提供了一条可扩展的路径。 显示英文摘要

摘要： We present a novel scheme for hybrid integration of quantum cascade laser bars with germanium-on-silicon waveguides operating in the mid-infrared. The laser bars are flip-chip bonded onto a germanium-on-silicon target chip without active alignment, acheiving end-fire coupling efficiency of up to 45% (3.5 dB loss) in pulsed operation. Optical power estimates indicate 20-30 mW coupled into the waveguides. The passive alignment approach, combined with a CMOS-compatible photonic integrated circuit fabrication process, offers a scalable pathway to fully integrated mid-infrared photonic systems for sensing, free-space communications, and the realisation of novel light sources.